Fabrication of porous and pillar-shaped Mg by magnetron sputtering Academic Article

abstract

• We report on the synthesis of nanostructured Mg platelets with nanopores and Mg pillars by magnetron sputtering techniques under different deposition conditions. By varying deposition parameters, the morphology of Mg varied from fully dense epitaxial films to polycrystalline nanoporous structures containing hexagonal platelets. The influence of layer thickness, deposition rate, incidence angle and mode of deposition (DC vs. RF sputtering) on morphology of Mg was investigated. Mg nanopillars were formed via glancing angle deposition technique. Density functional theory (DFT) calculation was performed to examine the influence of surface diffusion on morphology of Mg films. 2013 Elsevier B.V.

authors

• Arroyave, Raymundo

published proceedings

• THIN SOLID FILMS

author list (cited authors)

• Ham, B., Junkew, A., Bufford, D., Arroyave, R., & Zhang, X.

citation count

• 3

complete list of authors

• Ham, B||Junkew, A||Bufford, D||Arroyave, R||Zhang, X

publication date

• January 2014

publisher

• Elsevier  Publisher

published in

• THIN SOLID FILMS  Journal

keywords

• Mg Pillars
• Platelets
• Porous Mg
• Sputtering

Digital Object Identifier (DOI)

• 10.1016/j.tsf.2013.10.173

start page

• 220

end page

• 226

volume

• 550

URL

• http://dx.doi.org/10.1016/j.tsf.2013.10.173