Producing LIGA-competitive microcomponents Conference Paper

name of conference

• Micromachining and Microfabrication Process Technology VI

authors

• Hung, Nguyen

published proceedings

• Proceedings of SPIE

author list (cited authors)

• Hung, W., Ali, M. Y., & Yuan, S.

citation count

• 3

complete list of authors

• Hung, Wayne NP||Ali, Mohammad Y||Yuan, Shu

editor list (cited editors)

• Karam, J. M., & Yasaitis, J. A.

publication date

• January 2000

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

Digital Object Identifier (DOI)

• 10.1117/12.396444

start page

• 49

end page

• 57

volume

• 4174

URL

• http://dx.doi.org/10.1117/12.396444