Producing LIGA-competitive microcomponents Conference Paper uri icon

name of conference

  • Micromachining and Microfabrication Process Technology VI

published proceedings

  • Proceedings of SPIE

author list (cited authors)

  • Hung, W., Ali, M. Y., & Yuan, S.

complete list of authors

  • Hung, Wayne NP||Ali, Mohammad Y||Yuan, Shu

editor list (cited editors)

  • Karam, J. M., & Yasaitis, J. A.

publication date

  • January 2000