Mathematical modeling of sputtering-induced surface roughness Conference Paper uri icon

name of conference

  • Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

published proceedings

  • Proceedings of SPIE

author list (cited authors)

  • Ali, M. Y., Hung, W., & Yuan, S.

complete list of authors

  • Ali, Mohammad Y||Hung, Wayne NP||Yuan, Shu

editor list (cited editors)

  • Courtois, B., Karam, J. M., Levitan, S. P., Markus, K. W., Tay, A., & Walker, J. A.

publication date

  • January 2001