Mathematical modeling of sputtering-induced surface roughness Conference Paper

name of conference

• Design, Test, Integration, and Packaging of MEMS/MOEMS 2001

authors

• Hung, Nguyen

published proceedings

• Proceedings of SPIE

author list (cited authors)

• Ali, M. Y., Hung, W., & Yuan, S.

citation count

• 1

complete list of authors

• Ali, Mohammad Y||Hung, Wayne NP||Yuan, Shu

editor list (cited editors)

• Courtois, B., Karam, J. M., Levitan, S. P., Markus, K. W., Tay, A., & Walker, J. A.

publication date

• January 2001

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

Digital Object Identifier (DOI)

• 10.1117/12.425392

start page

• 510

end page

• 521

volume

• 4408

URL

• http://dx.doi.org/10.1117/12.425392