Mathematical modeling of sputtering-induced surface roughness
Conference Paper
-
- Overview
-
- Identity
-
- Additional Document Info
-
- Other
-
- View All
-
Overview
name of conference
-
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
published proceedings
author list (cited authors)
-
Ali, M. Y., Hung, W., & Yuan, S.
citation count
complete list of authors
-
Ali, Mohammad Y||Hung, Wayne NP||Yuan, Shu
editor list (cited editors)
-
Courtois, B., Karam, J. M., Levitan, S. P., Markus, K. W., Tay, A., & Walker, J. A.
publication date
publisher
published in
Identity
Digital Object Identifier (DOI)
Additional Document Info
start page
end page
volume
Other
URL
-
http://dx.doi.org/10.1117/12.425392