A methodology for nanosecond (or better) time resolved thermoreflectance imaging with coherence control of laser pulses
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abstract
A time-domain thermoreflectance imaging methodology with pulsed laser illumination is developed to achieve nanosecond time resolution with diffraction limited spatial resolution. Validation of the proposed methodology through a transient temperature measurement of a micro gold resistor under 110 ns pulsed heating is demonstrated, which shows consistency with the corresponding numerical simulation. This approach allows us to determine the transient energy transport in miniature structures, such as microelectronic and nano-photonic devices. 2013 AIP Publishing LLC.