Fabrication of micro-optical devices at the end of a multimode optical fiber with negative tone lift-off EBL

A fabrication method based on negative tone lift off EBL is developed for constructing nano-structures at end faces of multimode optical fibers. With this new approach, precise and robust nano-structures with high spatial resolutions can be fabricated with minimum damage to the optical fiber face during the fabrication process. Based on this approach, high numerical aperture micro Fresnel zone plates (MZP) with focal lengths 3 m were fabricated on the face of an optical fiber. The focusing characteristics of the fabricated MZP showed good consistency with the numerical simulations at the specified wavelength (405 nm). 2012 IOP Publishing Ltd.

Fabrication of micro-optical devices at the end of a multimode optical fiber with negative tone lift-off EBL Academic Article