Finite element characterization of the size-dependent mechanical behaviour in nanosystems.
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Mechanical behaviour analysis plays an important role in the design of micro/nano-electromechanical system (MEMS/NEMS) devices for reliability. In this paper, the size-dependent mechanical properties of nanostructures are numerically studied with the finite element method (FEM) by developing a kind of surface element to take into account the surface elastic effect. This method is then applied to the investigation of the interaction between two pressurized nanovoids and the effective moduli of two-dimensional nanoporous material. The numerical results indicate that surface elasticity can significantly alter the nature of interaction forms and the effective moduli by inducing a strong size dependence in conventional results.
