Nonlinear analysis of microbeam under electrostatic loading
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In this study we investigated the behavior of a microbeam subjected to electrostatic loading. Two devices, namely, a tungsten microtweezer and a clamped-clamped beam which is part of a micro-electromechanical system (MEMS), are used. The deflection of beams is studied for various cases of loading, i.e., constant loading, linear loading and nonlinear loading. Both linear and non-linear behavior of the microbeams are studied. The Euler-Bernoulli beam theory as well as the Timoshenko beam theory is used to study deflection of the beams. Governing equations are solved for each case by two different approaches. Simple cases of the governing equations are solved analytically. The nonlinear differential equation is solved by the finite element method. Results for different cases are compared and discussed.
