Effect of rapid thermal annealing on the properties of PECVD SiN_x thin films Academic Article

authors

• Subramaniam, Velumani

published proceedings

• MATERIALS CHEMISTRY AND PHYSICS

author list (cited authors)

• Karunagaran, B., Chung, S. J., Velumani, S., & Suh, E.

citation count

• 29

complete list of authors

• Karunagaran, B||Chung, SJ||Velumani, S||Suh, E-K

publication date

• November 2007

publisher

• Elsevier  Publisher

keywords

• Optical Properties
• Pecvd
• Rta
• Sin
• Solar Cell

Digital Object Identifier (DOI)

• 10.1016/j.matchemphys.2007.05.028

start page

• 130

end page

• 133

volume

• 106

issue

• 1

URL

• http://dx.doi.org/10.1016/j.matchemphys.2007.05.028