Size modulation of nanocrystalline silicon embedded in amorphous silicon oxide by Cat-CVD Academic Article

authors

• Subramaniam, Velumani

published proceedings

• THIN SOLID FILMS

author list (cited authors)

• Matsumoto, Y., Godavarthi, S., Ortega, M., Sanchez, V., Velumani, S., & Mallick, P. S.

citation count

• 17

complete list of authors

• Matsumoto, Y||Godavarthi, S||Ortega, M||Sanchez, V||Velumani, S||Mallick, PS

publication date

• January 2011

publisher

• Elsevier  Publisher

published in

• THIN SOLID FILMS  Journal

keywords

• Cat-cvd
• Micro-raman
• Nanocrystalline-silicon
• X-ray-diffraction

Digital Object Identifier (DOI)

• 10.1016/j.tsf.2011.01.325

start page

• 4498

end page

• 4501

volume

• 519

issue

• 14

URL

• http://dx.doi.org/10.1016/j.tsf.2011.01.325