Influence of working pressure on the structural, optical and electrical properties of sputter deposited AZO thin films Academic Article

authors

• Subramaniam, Velumani

published proceedings

• MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

author list (cited authors)

• Park, H., Hussain, S. Q., Velumani, S., Le, A., Ahn, S., Kim, S., & Yi, J.

citation count

• 23

complete list of authors

• Park, Hyeongsik||Hussain, S Qamar||Velumani, S||Le, Anh Huy Tuan||Ahn, Shihyun||Kim, Sunbo||Yi, Junsin

publication date

• January 2015

publisher

• Elsevier  Publisher

published in

• Materials Science in Semiconductor Processing  Journal

keywords

• Mechanism
• Thermal Annealing
• Thin Film Solar Cell
• Zinc Oxide

Digital Object Identifier (DOI)

• 10.1016/j.mssp.2014.12.076

start page

• 29

end page

• 36

volume

• 37

URL

• http://dx.doi.org/10.1016/j.mssp.2014.12.076