Improvement of data retention characteristics of OSOSO multi-stacked MIS capacitor for flat panel display technology

authors

• Subramaniam, Velumani

published proceedings

• MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

author list (cited authors)

• Raja, J., Jung, S., Jang, K., Jin, Z., Chatterjee, S., Velumani, S., Kim, J., & Yi, J.

citation count

• 0

complete list of authors

• Raja, Jayapal||Jung, Sungwook||Jang, Kyungsoo||Jin, Zhenghai||Chatterjee, Somenath||Velumani, S||Kim, Jiwoong||Yi, Junsin

publication date

• January 2015

publisher

• Elsevier  Publisher

published in

• Materials Science in Semiconductor Processing  Journal

keywords

• Oxide-silicon-oxynitride-silicon-oxynitride (ososo)
• Stacked Nvm
• System-on-panel (sop) Display

Digital Object Identifier (DOI)

• 10.1016/j.mssp.2014.12.037

start page

• 9

end page

• 13

volume

• 37

URL

• http://dx.doi.org/10.1016/j.mssp.2014.12.037