Micromachined water-immersible scanning mirror with torsional and bending hinges Conference Paper

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name of conference

MOEMS and Miniaturized Systems XXI

authors

Zou, Jun

published proceedings

MOEMS AND MINIATURIZED SYSTEMS XXI

author list (cited authors)

Li, S., Duan, X., & Zou, J.

citation count

0

complete list of authors

Li, Shuangliang||Duan, Xiaoyu||Zou, Jun

editor list (cited editors)

Piyawattanametha, W., Park, Y., & Zappe, H.

publication date

March 2022

publisher

SPIE, the international society for optics and photonics Publisher

published in

Proceedings of SPIE Journal