On an Application of Denoising to the Uncertainty Quantification of Line Edge Roughness Estimation Conference Paper

name of conference

• 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

authors

• Savari, Serap

published proceedings

• 2022 33RD ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC)

author list (cited authors)

• Akpabio, I. I., & Savari, S. A.

citation count

• 1

complete list of authors

• Akpabio, Inimfon I||Savari, Serap A

publication date

• May 2022

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings  Journal

keywords

• Conformal Prediction
• Line Edge Roughness
• Machine Learning
• Quantile Regression
• Uncertainty Quantification

Digital Object Identifier (DOI)

• 10.1109/ASMC54647.2022.9792521

start page

• 1

end page

• 6

volume

• 00

URL

• http://dx.doi.org/10.1109/asmc54647.2022.9792521