Analytical and experimental study of mismatch strain-induced microcantilever behavior during deposition

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authors

Boyd, James

published proceedings

JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY

author list (cited authors)

Kim, S., & Boyd, J. G.

citation count

3

complete list of authors

Kim, Sang-Hyun||Boyd, James G

publication date

March 2007

publisher

Springer Nature Publisher

published in

n1738-494XISSN Journal