Modeling of mechanical behavior of microcantilever due to intrinsic strain during deposition Academic Article

authors

• Boyd, James

published proceedings

• JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY

author list (cited authors)

• Kim, S., Mani, S., & Boyd, J. G.

citation count

• 5

complete list of authors

• Kim, Sang-Hyun||Mani, Sathyanarayanan||Boyd, James G

publication date

• October 2006

publisher

• Springer Nature  Publisher

published in

• n1738-494XISSN  Journal

keywords

• Beam Deflection
• Deposition
• Intrinsic Strain
• Multilayer Microcantilever
• Residual Stress

Digital Object Identifier (DOI)

• 10.1007/BF02916268

start page

• 1646

end page

• 1652

volume

• 20

issue

• 10

URL

• http://dx.doi.org/10.1007/bf02916268