Modeling of mechanical behavior of microcantilever due to intrinsic strain during deposition
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Overview
published proceedings
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JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY
author list (cited authors)
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Kim, S., Mani, S., & Boyd, J. G.
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Kim, Sang-Hyun||Mani, Sathyanarayanan||Boyd, James G
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Beam Deflection
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Deposition
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Intrinsic Strain
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Multilayer Microcantilever
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Residual Stress
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http://dx.doi.org/10.1007/bf02916268