Nanolithographic Patterning of Catalysts for Synthesis of Carbon Nanotubes Conference Paper uri icon


  • A novel process was developed for synthesis of carbon nanotubes (CNT) which does not require the traditional Chemical Vapor Deposition (CVD) synthesis techniques. Catalyst precursors were deposited in bulk using a "wet process" on the MEMS enabled micro-heater elements. The microheaters were coated with a layer of fullerene apriori (of 150 nm thickness) using Physical Vapor Deposition (PVD). The chip was then heated using integrated microheaters and external heaters in an inert atmosphere to obtain CNT. Thus, in this process we obviate the Chemical Vapor Deposition (CVD) process for synthesis of CNT (SWCNT and MWCNT). This work also proves the feasibility for a portable hand held instrument for synthesis of CNT "on demand".

author list (cited authors)

  • Gargate, R. V., & Banerjee, D.

publication date

  • October 2008