Rapid Synthesis of Patterned Silicon Carbide Coatings Using Laser-Induced Pyrolysis and Crystallization of Polycarbosilane Academic Article uri icon

abstract

  • The conversion of preceramic polymers to ceramics normally requires multiple processing steps such as curing, pyrolysis, and crystallization, which can be time and energyconsuming. Herein, onestep rapid synthesis of cubic silicon carbide (SiC) by laserassisted pyrolysis and crystallization of molten polycarbosilane (PCS) is shown. The resulting product is termed as LISiC (laserinduced silicon carbide). It is demonstrated that repeated polymer infiltration and lasing can be used to make dense LISiC and SiCLISiC coatings, which are stable up to 1073K in air. It was also demonstrated that LISiC can be patterned on various substrates such as copper, steel, aluminum, and silicon wafer with a rate of 3cm2min1. Finally, it is found that the dense LISiC coatings rapidly heat up in response to radio frequency (RF) fields, which would enable outofoven manufacturing of SiCbased composites, microheaters, and efficient chemical synthesis in reactors employing SiCbased catalyst supports.

published proceedings

  • ADVANCED ENGINEERING MATERIALS

altmetric score

  • 1.35

author list (cited authors)

  • Anas, M., Cao, H., Oh, J. H., Sarmah, A., Long, C. T., Khan, M., ... Green, M. J.

citation count

  • 3

publication date

  • July 2022

publisher