Poly(ferrocenyldimethylsilanes) for reactive ion etch barrier applications Academic Article

authors

• Thomas, Edwin

published proceedings

• CHEMISTRY OF MATERIALS

altmetric score

• 6

author list (cited authors)

• Lammertink, R., Hempenius, M. A., Chan, V., Thomas, E. L., & Vancso, G. J.

citation count

• 87

complete list of authors

• Lammertink, RGH||Hempenius, MA||Chan, VZH||Thomas, EL||Vancso, GJ

publication date

• February 2001

publisher

• American Chemical Society (ACS)  Publisher

published in

• CHEMISTRY OF MATERIALS  Journal

Digital Object Identifier (DOI)

• 10.1021/cm001052q

start page

• 429

end page

• 434

volume

• 13

issue

• 2

URL

• http://dx.doi.org/10.1021/cm001052q