Optical properties of super stoichiometric TiN_1+x thin films

authors

• Aguilar-Mendoza, Guillermo

published proceedings

• THIN SOLID FILMS

author list (cited authors)

• Penilla, E., Perez-Gutierrez, F. G., Duvall, W., Aguilar, G., & Wang, J.

complete list of authors

• Penilla, Elias||Perez-Gutierrez, Francisco G||Duvall, Wyatt||Aguilar, Guillermo||Wang, Junlan

publisher

• Elsevier  Publisher

published in

• THIN SOLID FILMS  Journal

keywords

• Absorption Coefficient
• Diffuse Reflectance
• Reactive Magnetron Dc-sputtering
• Specular Reflectance
• Surface Roughness
• Thin Films
• Titanium Nitride

Digital Object Identifier (DOI)

• 10.1016/j.tsf.2012.10.016

start page

• 272

end page

• 277

volume

• 524