Micro-fabrication of Si-based optomechanical inertial sensors for cryogenic temperatures Conference Paper

name of conference

• Applied Optical Metrology IV

authors

• Guzman, Felipe

published proceedings

• APPLIED OPTICAL METROLOGY IV

author list (cited authors)

• Nelson, A., & Guzman, F.

citation count

• 1

complete list of authors

• Nelson, Andrea||Guzman, Felipe

editor list (cited editors)

• Novak, E., Trolinger, J. D., & Wilcox, C. C.

publication date

• August 2021

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Accelerometer
• Bosch
• Inertial Sensor
• Micro-fabrication

Digital Object Identifier (DOI)

• 10.1117/12.2594388

start page

• 118170g-118170g-6

volume

• 11817