Micro-fabrication of Si-based optomechanical inertial sensors for cryogenic temperatures Conference Paper uri icon

name of conference

  • Applied Optical Metrology IV

published proceedings

  • APPLIED OPTICAL METROLOGY IV

author list (cited authors)

  • Nelson, A., & Guzman, F.

citation count

  • 1

complete list of authors

  • Nelson, Andrea||Guzman, Felipe

editor list (cited editors)

  • Novak, E., Trolinger, J. D., & Wilcox, C. C.

publication date

  • August 2021