Noise suppression methods in picometer heterodyne displacement interferometer Conference Paper

name of conference

• Applied Optical Metrology IV

authors

• Guzman, Felipe

published proceedings

• APPLIED OPTICAL METROLOGY IV

author list (cited authors)

• Zhang, Y., & Guzman, F.

citation count

• 0

complete list of authors

• Zhang, Yanqi||Guzman, Felipe

editor list (cited editors)

• Novak, E., Trolinger, J. D., & Wilcox, C. C.

publication date

• August 2021

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Displacement Measuring Interferometry (dmi)
• Heterodyne Interferometer
• Inertial Sensing
• Noise Suppression

Digital Object Identifier (DOI)

• 10.1117/12.2594717

start page

• 118170a-118170a-12

volume

• 11817