Micromachined two-axis water-immersible scanning mirror using torsional and bending hinges
Academic Article
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Overview
author list (cited authors)
- Li, S., Duan, X., & Zou, J.
complete list of authors
- Li, Shuangliang||Duan, Xiaoyu||Zou, Jun
publication date
- October 2021
publisher
- SPIE-Intl Soc Optical Eng Publisher
published in
- Journal of Optical Microsystems Journal