Adjusting to 3D Devices in a 2D Device World
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The challenges of device scaling and short channel effects have necessitated the close examination of 3 dimensional processing. While this certainly comes with challenges in processing and metrology, it also comes with opportunities for new device paradigms and analysis methods. We will look at an historical perspective of 3D processing and further examine how to accurately "think" 3D to achieve some of these goals and the ramifications of a few interesting device tricks that 3D processing provides. ©2008 IEEE.
author list (cited authors)
Harris, H. R., Adhikari, H., Smith, C. E., Smith, G., Yang, J., Majhi, P., & Jammy, R.