Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design Conference Paper uri icon

abstract

  • Abstract An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

name of conference

  • ASME 2001 International Mechanical Engineering Congress and Exposition

published proceedings

  • Micro-Electro-Mechanical Systems (MEMS)

author list (cited authors)

  • Kilani, M. I., Galambos, P. C., Haik, Y. S., & Chen, C.

citation count

  • 0

complete list of authors

  • Kilani, Mohammad I||Galambos, Paul C||Haik, Yousef S||Chen, Ching-Jen

publication date

  • November 2001