Atmospheric-Pressure Plasma Microdischarges for High-Rate Deposition Conference Paper uri icon

author list (cited authors)

  • Farouk, B., Staack, D., Farouk, T., Gutsol, A., & Fridman, A.

publication date

  • January 1, 2007 11:11 AM
  • January 1, 2007 11:11 AM