Serrated grating formation method and diffraction optical device manufacturing method using same
Patent
Overview
Overview
abstract
Disclosed are a method of forming a sawtooth grating which can realize a straight sawtooth shape, and a method of manufacturing a diffractive optical device using the same. A method of manufacturing a diffractive optical device includes forming a photoresist pattern on a substrate, irradiating an etch beam to an substrate having the photoresist pattern at an angle satisfying the following equation, and irradiating the etch beam to the photoresist pattern and the substrate. Etching the photoresist, etching the photoresist pattern and the substrate to form a mold having a lattice on the surface, and forming a resin substrate having a lattice on the surface using the mold. Therefore, the sawtooth resin substrate can be manufactured by improving the efficiency of the diffraction grating by implementing a straight sawtooth shape.
