Semiconductor wafer with ultra thin doping level formed by defect engineering Patent uri icon

author list (cited authors)

  • Chu, W., Shao, L., Lu, X., Liu, J., & Wang, X.

complete list of authors

  • Chu, Wei-Kan||Shao, Lin||Lu, Xinming||Liu, Jiarui||Wang, Xuemei

publication date

  • November 2004