Solvent Compatibility of Parylene C Film Layer Academic Article

authors

• Ceylan Koydemir, Hatice

published proceedings

• JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

altmetric score

• 3

author list (cited authors)

• Koydemir, H. C., Kulah, H., & Ozgen, C.

citation count

• 15

complete list of authors

• Koydemir, H Ceylan||Kulah, H||Ozgen, C

publication date

• April 2014

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Journal of Microelectromechanical Systems  Journal

keywords

• Chip Scale Packaging
• Implants
• Insulation
• Microfluidics
• Solvents

Digital Object Identifier (DOI)

• 10.1109/JMEMS.2013.2273032

start page

• 298

end page

• 307

volume

• 23

issue

• 2

URL

• http://dx.doi.org/10.1109/jmems.2013.2273032