Solvent Compatibility of Parylene C Film Layer Academic Article uri icon

published proceedings

  • JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

author list (cited authors)

  • Koydemir, H. C., Kulah, H., & Ozgen, C.

complete list of authors

  • Koydemir, H Ceylan||Kulah, H||Ozgen, C

publication date

  • January 1, 2014 11:11 AM