Solvent Compatibility of Parylene C Film Layer
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Overview
published proceedings
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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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author list (cited authors)
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Koydemir, H. C., Kulah, H., & Ozgen, C.
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complete list of authors
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Koydemir, H Ceylan||Kulah, H||Ozgen, C
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Research
keywords
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Chip Scale Packaging
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Implants
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Insulation
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Microfluidics
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Solvents
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Digital Object Identifier (DOI)
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URL
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http://dx.doi.org/10.1109/jmems.2013.2273032