Effects of Solvents on Dissolution of Photoresist in Parylene Microchannels Conference Paper uri icon

published proceedings

  • NANOTECHNOLOGY 2012, VOL 2: ELECTRONICS, DEVICES, FABRICATION, MEMS, FLUIDICS AND COMPUTATIONAL

author list (cited authors)

  • Koydemir, H. C., Kulah, H., Ozgen, C., & Tosun, I.

complete list of authors

  • Koydemir, Hatice Ceylan||Kulah, Haluk||Ozgen, Callan||Tosun, Ismail

publication date

  • January 2012