Defect Engineering: A New Approach on Ultra-Shallow Junction in Silicon Academic Article
- Overview
- Additional Document Info
- View All
Overview
published proceedings
- Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics
author list (cited authors)
- Shao, L., Lu, X., Wang, X., Rusakova, I., Liu, J., & Chu, W.
complete list of authors
- Shao, Lin||Lu, X||Wang, X||Rusakova, I||Liu, J||Chu, W
publication date
- January 2002
publisher
- American Institute of Physics Publisher