Reduction of Boride Enhanced Diffusion by Point Defect Engineering and Its Application for Shallow Junction Formation Academic Article uri icon

published proceedings

  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

author list (cited authors)

  • Shao, L., Liu, J., Wang, X., Chen, H., Thompson, P., & Chu, W.

complete list of authors

  • Shao, Lin||Liu, J||Wang, X||Chen, H||Thompson, P||Chu, W

publication date

  • January 2003