Reduction of Boride Enhanced Diffusion by Point Defect Engineering and Its Application for Shallow Junction Formation
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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Shao, L., Liu, J., Wang, X., Chen, H., Thompson, P., & Chu, W.
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Shao, Lin||Liu, J||Wang, X||Chen, H||Thompson, P||Chu, W
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