Ultra Shallow Junction Formation by Point Defect Engineering Academic Article

authors

• Shao, Lin

published proceedings

• Journal of Vacuum Science and Technology B

author list (cited authors)

• Shao, L., Thompson, P., van der Heide, P., Patel, S., Chen, O., Wang, X., ... Chu, W.

complete list of authors

• Shao, Lin||Thompson, P||van der Heide, P||Patel, S||Chen, O||Wang, X||Chen, H||Liu, J||Chu, W

publication date

• January 2004

publisher

• AIP Publishing  Publisher

published in

• Journal of Vacuum Science and Technology B  Journal

volume

• 22

issue

• 302