The Energy Dependence of Excessive Vacancies Created by High Energy Ion Implantation Academic Article

authors

• Nastasi, Michael
• Shao, Lin

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

author list (cited authors)

• Shao, L., Nastasi, M., Thompson, P. E., Rusakova, I., Liu, J., & Chu, W.

complete list of authors

• Shao, Lin||Nastasi, M||Thompson, PE||Rusakova, I||Liu, J||Chu, W

publication date

• January 2006

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

volume

• 242

issue

• 506