Maskless nanofabrication of electronic components Patent uri icon

abstract

  • The present invention relates to systems, materials and methods for the formation of conducting, semiconducting, and dielectric layers, structures and devices from suspensions of nanoparticles. Drop-on-demand systems are used in some embodiments to fabricate various electronic structures including conductors, capacitors, FETs. Selective laser ablation is used in some embodiments to pattern more precisely the circuit elements and to form small channel devices.

author list (cited authors)

  • Grigoropoulos, C. P., Ko, S., Chung, J., Poulikakos, D., & Pan, H.

publication date

  • March 2010