Substrate support ring for more uniform layer thickness Patent uri icon

abstract

  • Embodiments of substrate support rings providing more uniform thickness of layers deposited or grown on a substrate are provided herein. In some embodiments, a substrate support ring includes: an inner ring with a centrally located support surface to support a substrate; and an outer ring extending radially outward from the support surface, wherein the outer ring comprises a reaction surface area disposed above and generally parallel to a support plane of the support surface, and wherein the reaction surface extends beyond the support surface by about 24 mm to about 45 mm.

author list (cited authors)

  • Pan, H., Hawrylchak, L., & Olsen, C. S.

publication date

  • February 2019