Apparatus and method for selective oxidation at lower temperature using remote plasma source Patent uri icon


  • Devices and methods for selectively oxidizing silicon are described herein. An apparatus for selective oxidation of exposed silicon surfaces includes a thermal processing chamber with a plurality of walls, first inlet connection and a second inlet connection, wherein the walls define a processing region within the processing chamber, a substrate support within the processing chamber, a hydrogen source connected with the first inlet connection, a heat source connected with the hydrogen source, and a remote plasma source connected with the second inlet connection and an oxygen source. A method for selective oxidation of non-metal surfaces, can include positioning a substrate in a processing chamber at a temperature less than 800° C., flowing hydrogen into the processing chamber, generating a remote plasma comprising oxygen, mixing the remote plasma with the hydrogen gas in the processing chamber to create an activated processing gas, and exposing the substrate to the activated gas.

author list (cited authors)

  • Pan, H., Rogers, M. S., Tjandra, A. S., & Olsen, C. S.

complete list of authors

  • Pan, Heng||Rogers, Matthew S||Tjandra, Agus S||Olsen, Christopher S

publication date

  • July 2020