A two-step annealing of shallow junctions formed by GeB cluster ion implantation of Si Conference Paper uri icon

name of conference

  • The CAARI 2000: Sixteenth international conference on the application of accelerators in research and industry

published proceedings

  • AIP Conference Proceedings

author list (cited authors)

  • Lu, X., Shao, L., Jin, J., Wang, X., Chen, Q. Y., Liu, J., Ling, P., & Chu, W.

citation count

  • 0

complete list of authors

  • Lu, Xinming||Shao, Lin||Jin, Jianyue||Wang, Xuemei||Chen, QY||Liu, Jiarui||Ling, Peiching||Chu, Wei-Kan

publication date

  • July 2001

publisher

  • AIP  Publisher