A two-step annealing of shallow junctions formed by GeB− cluster ion implantation of Si Conference Paper uri icon

author list (cited authors)

  • Lu, X., Shao, L., Jin, J., Wang, X., Chen, Q. Y., Liu, J., Ling, P., & Chu, W.

citation count

  • 0

publication date

  • July 2001
  • January 1, 2001 11:11 AM


  • AIP  Publisher