The alternative ion implantation approaches for ultra-shallow junction Conference Paper uri icon

author list (cited authors)

  • Chu, W., Liu, J., Jin, J., Lu, X., Shao, L., Li, Q., & Ling, P.

citation count

  • 0

publication date

  • July 2001
  • January 1, 2001 11:11 AM

publisher

  • AIP  Publisher