The alternative ion implantation approaches for ultra-shallow junction Conference Paper uri icon

name of conference

  • The CAARI 2000: Sixteenth international conference on the application of accelerators in research and industry

published proceedings

  • AIP Conference Proceedings

author list (cited authors)

  • Chu, W., Liu, J., Jin, J., Lu, X., Shao, L., Li, Q., & Ling, P.

citation count

  • 0

complete list of authors

  • Chu, Wei-Kan||Liu, Jiarui||Jin, Jianyue||Lu, Xinming||Shao, Lin||Li, Qingmian||Ling, Peiching

publication date

  • July 2001


  • AIP  Publisher