The alternative ion implantation approaches for ultra-shallow junction Conference Paper

name of conference

• AIP Conference Proceedings

authors

• Shao, Lin

published proceedings

• AIP Conference Proceedings

author list (cited authors)

• Chu, W., Liu, J., Jin, J., Lu, X., Shao, L., Li, Q., & Ling, P.

citation count

• 1

complete list of authors

• Chu, Wei-Kan||Liu, Jiarui||Jin, Jianyue||Lu, Xinming||Shao, Lin||Li, Qingmian||Ling, Peiching

publication date

• July 2001

publisher

• AIP Publishing  Publisher

published in

• AIP Conference Proceedings  Journal

keywords

• 51 Physical Sciences
• 5108 Quantum Physics
• 7 Affordable And Clean Energy

Digital Object Identifier (DOI)

• 10.1063/1.1395446

start page

• 891

end page

• 895

volume

• 576

issue

• 1

URL

• http://dx.doi.org/10.1063/1.1395446

user-defined tag

• 7 Affordable and Clean Energy