Recoil implantation of boron into silicon by high energy silicon ions Conference Paper

name of conference

• AIP Conference Proceedings

authors

• Shao, Lin

published proceedings

• AIP Conference Proceedings

author list (cited authors)

• Shao, L., Lu, X. M., Wang, X. M., Rusakova, I., Mount, G., Zhang, L. H., Liu, J. R., & Chu, W.

citation count

• 1

complete list of authors

• Shao, L||Lu, XM||Wang, XM||Rusakova, I||Mount, G||Zhang, LH||Liu, JR||Chu, Wei-Kan

publication date

• July 2001

publisher

• AIP Publishing  Publisher

published in

• AIP Conference Proceedings  Journal

keywords

• 51 Physical Sciences
• 5110 Synchrotrons And Accelerators

Digital Object Identifier (DOI)

• 10.1063/1.1395448

start page

• 900

end page

• 903

volume

• 576

issue

• 1

URL

• http://dx.doi.org/10.1063/1.1395448

user-defined tag

• 7 Affordable and Clean Energy