Recoil implantation of boron into silicon by high energy silicon ions Conference Paper uri icon

author list (cited authors)

  • Shao, L., Lu, X. M., Wang, X. M., Rusakova, I., Mount, G., Zhang, L. H., Liu, J. R., & Chu, W.

citation count

  • 0

publication date

  • July 2001
  • January 1, 2001 11:11 AM

publisher

  • AIP  Publisher