Recoil implantation of boron into silicon by high energy silicon ions Conference Paper uri icon

name of conference

  • The CAARI 2000: Sixteenth international conference on the application of accelerators in research and industry

published proceedings

  • AIP Conference Proceedings

author list (cited authors)

  • Shao, L., Lu, X. M., Wang, X. M., Rusakova, I., Mount, G., Zhang, L. H., Liu, J. R., & Chu, W.

citation count

  • 0

complete list of authors

  • Shao, L||Lu, XM||Wang, XM||Rusakova, I||Mount, G||Zhang, LH||Liu, JR||Chu, Wei-Kan

publication date

  • July 2001

publisher

  • AIP  Publisher