Nonlinear effect of carbon cluster induced damage in silicon Conference Paper uri icon

author list (cited authors)

  • Xie, Z., Wang, X., Lu, X., Shao, L., Liu, J., & Chu, W.

citation count

  • 1

publication date

  • January 1, 2001 11:11 AM
  • July 2001

publisher

  • AIP  Publisher