In-Volume Laser Direct Writing of Silicon-Challenges and Opportunities Academic Article

published proceedings

• LASER & PHOTONICS REVIEWS

altmetric score

• 1.25

author list (cited authors)

• Chambonneau, M., Grojo, D., Tokel, O., Ilday, F. O., Tzortzakis, S., & Nolte, S.

citation count

• 5

complete list of authors

• Chambonneau, Maxime||Grojo, David||Tokel, Onur||Ilday, Fatih Ömer||Tzortzakis, Stelios||Nolte, Stefan

publication date

• September 2021

publisher

• Wiley  Publisher

published in

• Laser and Photonics Reviews  Journal

keywords

• Infrared
• Laser Direct Writing
• Laser-matter Interaction
• Nonlinear Propagation
• Processing
• Silicon

Digital Object Identifier (DOI)

• 10.1002/lpor.202100140

start page

• 2100140

end page

• 2100140

volume

• 15

issue

• 11

URL

• http://dx.doi.org/10.1002/lpor.202100140