A Two-Axis Water-Immersible Micro Scanning Mirror (WIMSM) Using Torsional and Bending Polymer Hinges Conference Paper uri icon

name of conference

  • MOEMS and Miniaturized Systems XX

published proceedings

  • MOEMS AND MINIATURIZED SYSTEMS XX

author list (cited authors)

  • Duan, X., & Zou, J.

citation count

  • 1

complete list of authors

  • Duan, Xiaoyu||Zou, Jun

editor list (cited editors)

  • Piyawattanametha, W., Park, Y., & Zappe, H.

publication date

  • March 2021