A Two-Axis Water-Immersible Micro Scanning Mirror (WIMSM) Using Torsional and Bending Polymer Hinges Conference Paper

name of conference

• MOEMS and Miniaturized Systems XX

authors

• Zou, Jun

published proceedings

• MOEMS AND MINIATURIZED SYSTEMS XX

author list (cited authors)

• Duan, X., & Zou, J.

citation count

• 1

complete list of authors

• Duan, Xiaoyu||Zou, Jun

editor list (cited editors)

• Piyawattanametha, W., Park, Y., & Zappe, H.

publication date

• March 2021

publisher

• SPIE, the international society for optics and photonics  Publisher

published in

• Proceedings of SPIE  Journal

keywords

• Photoacoustic Microscopy
• Torsional And Bending Hinges
• Ultrasound Microscopy
• Water-immersible Scanning Mirror

Digital Object Identifier (DOI)

• 10.1117/12.2578907

start page

• 116970a-116970a-6

volume

• 11697

URL

• http://dx.doi.org/10.1117/12.2578907