Mid-infrared integrated photonics for chemical sensing Patent uri icon


  • A waveguide structure including a mid-infrared-transparent waveguide on a mid-infrared-transparent undercladding may serve as a photonic chemical sensor for measuring characteristic absorptions of analytes brought in physical contact with the waveguide. In some embodiments, a sensor including an amorphous-silicon waveguide on a barium-titanate undercladding can operate at wavelengths ranging from 2.5 .mu.m to about 7 .mu.m; this sensor may be manufactured by epitaxial growth of the undercladding on a substrate, followed by CMOS-compatible creation of the waveguide. Additional embodiments are disclosed.

author list (cited authors)

  • Lin, P. T.

complete list of authors

  • Lin, Pao Tai

publication date

  • July 2020