Amorphous Carbon Thin Films for Interfaces in MEMS Conference Paper

abstract

• Friction and nanoscratch tests were performed on amorphous carbon thin films deposited on silicon. The effect of process and conditions on CVD deposited films was studied. Coefficient of friction between the films was estimated by using a special oscillating microtribometer. The lateral force and maximum depth of scratching were measured during nanoscratch tests. The comparison of tribological behavior of the tested films is presented and discussed.

name of conference

• World Tribology Congress III, Volume 2

authors

• Erdemir, Ali

published proceedings

• World Tribology Congress III, Volume 2

author list (cited authors)

• Malyska, K., Erdemir, A., Chizhik, S. A., Rymuza, Z., & Ratajczyk, L.

citation count

• 0

complete list of authors

• Malyska, K||Erdemir, Ali||Chizhik, Sergey A||Rymuza, Zygmunt||Ratajczyk, Lukasz

publication date

• January 2005

publisher

• ASME International  Publisher

Digital Object Identifier (DOI)

• 10.1115/wtc2005-63147

start page

• 723

end page

• 724

URL

• http://dx.doi.org/10.1115/wtc2005-63147