Amorphous Carbon Thin Films for Interfaces in MEMS Conference Paper uri icon


  • Friction and nanoscratch tests were performed on amorphous carbon thin films deposited on silicon. The effect of process and conditions on CVD deposited films was studied. Coefficient of friction between the films was estimated by using a special oscillating microtribometer. The lateral force and maximum depth of scratching were measured during nanoscratch tests. The comparison of tribological behavior of the tested films is presented and discussed.

name of conference

  • World Tribology Congress III, Volume 2

published proceedings

  • World Tribology Congress III, Volume 2

author list (cited authors)

  • Malyska, K., Erdemir, A., Chizhik, S. A., Rymuza, Z., & Ratajczyk, L.

citation count

  • 0

complete list of authors

  • Malyska, K||Erdemir, Ali||Chizhik, Sergey A||Rymuza, Zygmunt||Ratajczyk, Lukasz

publication date

  • January 1, 2005 11:11 AM