A Graph-Theoretic Approach for Spatial Filtering and Its Impact on Mixed-Type Spatial Pattern Recognition in Wafer Bin Maps Academic Article

authors

• Ding, Yu

published proceedings

• IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

altmetric score

• 1

author list (cited authors)

• Ezzat, A. A., Liu, S., Hochbaum, D. S., & Ding, Y. u.

citation count

• 9

complete list of authors

• Ezzat, Ahmed Aziz||Liu, Sheng||Hochbaum, Dorit S||Ding, Yu

publication date

• May 2021

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Semiconductor Manufacturing  Journal

keywords

• Clustering
• Graph Theory
• Mixture Models
• Pattern Recognition
• Production
• Semiconductor Device Modeling
• Shape
• Spatial Data Science
• Systematics
• Task Analysis
• Unsupervised Learning
• Wafer Bin Maps

Digital Object Identifier (DOI)

• 10.1109/TSM.2021.3062943

start page

• 194

end page

• 206

volume

• 34

issue

• 2

URL

• http://dx.doi.org/10.1109/tsm.2021.3062943