Twostage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces Academic Article uri icon

published proceedings

  • AIP Conference Proceedings

author list (cited authors)

  • Kobayashi, N. P., & Williams, R. S.

citation count

  • 1

complete list of authors

  • Kobayashi, Nobuhiko P||Williams, R Stanley

publication date

  • May 2008


  • AIP  Publisher