Two-stage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces Academic Article

authors

• Williams, R. Stanley

published proceedings

• AIP Conference Proceedings

author list (cited authors)

• Kobayashi, N. P., Williams, R. S., Ao, S., Amouzegar, M. A., & Chen, S.

citation count

• 1

complete list of authors

• Kobayashi, Nobuhiko P||Williams, R Stanley||Ao, Sio-Iong||Amouzegar, Mahyar A||Chen, Su-Shing

publication date

• May 2008

publisher

• AIP  Publisher

published in

• 25TH INTERNATIONAL CONFERENCE ON THE APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY  Journal

Digital Object Identifier (DOI)

• 10.1063/1.2937616

start page

• 57

end page

• 67

volume

• 1007

issue

• 1