Twostage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces Academic Article

authors

• Williams, R. Stanley

published proceedings

• AIP Conference Proceedings

author list (cited authors)

• Kobayashi, N. P., & Williams, R. S.

citation count

• 1

complete list of authors

• Kobayashi, Nobuhiko P||Williams, R Stanley

publication date

• May 2008

publisher

• AIP  Publisher

published in

• AIP Conference Proceedings  Journal

Digital Object Identifier (DOI)

• 10.1063/1.2937616

start page

• 57

end page

• 67

volume

• 1007

issue

• 1