Two-stage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces Academic Article uri icon

published proceedings

  • AIP Conference Proceedings

author list (cited authors)

  • Kobayashi, N. P., Williams, R. S., Ao, S., Amouzegar, M. A., & Chen, S.

citation count

  • 1

complete list of authors

  • Kobayashi, Nobuhiko P||Williams, R Stanley||Ao, Sio-Iong||Amouzegar, Mahyar A||Chen, Su-Shing

publication date

  • May 2008

publisher

  • AIP  Publisher