Two-stage Atomic Layer Deposition: Deposition of Aluminum Oxide Films on Hydrophilic and Hydrophobic Surfaces
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AIP Conference Proceedings
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Kobayashi, N. P., Williams, R. S., Ao, S., Amouzegar, M. A., & Chen, S.
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Kobayashi, Nobuhiko P||Williams, R Stanley||Ao, Sio-Iong||Amouzegar, Mahyar A||Chen, Su-Shing
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