Ion Implantation with Beams Chapter uri icon

author list (cited authors)

  • Nastasi, M., & Hubler, G. K.

complete list of authors

  • Nastasi, M||Hubler, GK

editor list (cited editors)

  • Glocker, D. B., & Shah, S. I.

Book Title

  • Handbook of Thin Film Process Technology

publication date

  • January 1995