Ion Implantation with Beams Chapter
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Overview
author list (cited authors)
- Nastasi, M., & Hubler, G. K.
complete list of authors
- Nastasi, M||Hubler, GK
editor list (cited editors)
- Glocker, D. B., & Shah, S. I.
Book Title
- Handbook of Thin Film Process Technology
publication date
- January 1995
publisher
- Institute of Physics Publishing Publisher