Initial operation of a largescale plasma source ion implantation experiment Academic Article

authors

• Nastasi, Michael

published proceedings

• Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

altmetric score

• 3

author list (cited authors)

• Wood, B. P., Henins, I., Gribble, R. J., Reass, W. A., Faehl, R. J., Nastasi, M. A., & Rej, D. J.

citation count

• 43

complete list of authors

• Wood, BP||Henins, I||Gribble, RJ||Reass, WA||Faehl, RJ||Nastasi, MA||Rej, DJ

publication date

• March 1994

publisher

• American Institute of Physics  Publisher

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

Digital Object Identifier (DOI)

• 10.1116/1.587362

start page

• 870

end page

• 874

volume

• 12

issue

• 2

URL

• http://dx.doi.org/10.1116/1.587362