Intrinsic Residual Stress Evolution in Thin Films During Energetic Particle Bombardment Chapter uri icon

author list (cited authors)

  • Misra, A., & Nastasi, M.

editor list (cited editors)

  • Knystautas, E.

Book Title

  • Engineering Thin Films and Nanostructures with Ion Beams

publication date

  • January 1, 2005 11:11 AM