REDUCED COMPRESSIVE STRESS IN DIAMONDLIKE CARBON THIN FILM BY LOW ENERGY PLASMA SOURCE ION IMPLANTATION Conference Paper uri icon

name of conference

  • 1998 MRS Fall Meeting & Exhibit

author list (cited authors)

  • Lee, D. H., Walter, K. C., & Nastasi, M. A.

complete list of authors

  • Lee, DH||Walter, KC||Nastasi, MA

publication date

  • November 1998