REDUCED COMPRESSIVE STRESS IN DIAMONDLIKE CARBON THIN FILM BY LOW ENERGY PLASMA SOURCE ION IMPLANTATION
Conference Paper
Overview
name of conference
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1998 MRS Fall Meeting & Exhibit
author list (cited authors)
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Lee, D. H., Walter, K. C., & Nastasi, M. A.
complete list of authors
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Lee, DH||Walter, KC||Nastasi, MA
publication date
Other
URL
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https://www.mrs.org/fall1998/symposium-n